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EDS analysis



EDS is also known as Energy-dispersive X-ray spectroscopy. This technique is  used for the chemical characterization of the sample. It is applicable for the elements with atomic number more than boron.




Principle of Operation

When the electron beam interacts with the sample, it generates X-ray fluorescence as shown in figure. The energy of each photon is the representative of the elements present in the sample. The Energy Dispersive spectrometer collects the X-rays and plots them as counts versus energy curve. It indentifies and labels the elements responsible for the peaks in this energy distribution.



Different modes of analysis

Bulk analysis

Spot analysis

Line scan

Chemical concentration map (elemental mapping)


      Factors affecting signal collection

      Beam energy (keV)

      Spot size

      Take off angle


Point EDAX

Point EDAX represents the elements present/compositional analysis of a particular point. It may be a single point or multi point analysis. One point or multi points are selected from the bulk sample and it shows the element presents in that selected point/points.



Fig. Point analysis shows the presence of W,Cr,Y,O


Line EDAX represents the elements present/compositional analysis of a selected line. It gives the idea about the line profile means the compositional information along the line.

Fig. Lline analysis shows the presence of W,Cr,Y,O

Elemental Mapping

Elemental mapping gives the overall distribution of all the elements  in the sample.

Fig X-ray elemental mapping shows the presence of W,Cr,Y.


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